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    Sulfur hexafluoride circuit breakers protect electrical power stations and distribution systems by interrupting electric currents, when tripped by a protective relay. Instead of oil, air, or a vacuum, a sulfur hexafluoride circuit breaker uses sulfur hexafluoride (SF 6 ) gas to cool and quench the arc on opening a circuit.

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    Sulfur hexafluoride is primarily of anthropogenic origin but also occurs naturally in minerals, rocks, and volcanic and igneous fluids. Concentrations of SF 6 in air have rapidly increased from a steady state value of about 0.02-0.05 to over 7 parts per trillion during the past 40 years, and are expected to continue increasing.

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    Sulfur hexafluoride. SF₆ Product information Characteristics Physical data Product specification Shipping information Sulfur hexafluoride is used for plasma etching prior to chemical vapor deposition (CVD). Its uses include oxide etching, nitride etching, and wafer cleaning. Sulfur hexafluoride is also used in plasma chamber cleaning processes.

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