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    Sulfur Hexafluoride (insulating gas) is an inorganic, colorless, odorless, and non-flammable gas. The primary use of Sulfur Hexafluoride (sf6 gas) is as a gaseous dielectric medium in the electrical industry for various voltage circuit breakers, switchgear and other electrical equipment; this often replaces oil filled circuit breakers (OCBs) that can contain harmful PCBs.

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    Sulfur Hexafluoride (Sulfr hexafluoride) is used for plasma etching prior to chemical vapor deposition (CVD). These processes include oxide etching, nitride etching and wafer cleaning. Sulfur Hexafluoride gas, which is itself inert, disassociates in the presence of an RF field to form reactive fluorine ions.

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